Cart (0)
  • No items in cart.
Total
$0
There is a technical issue about last added item. You can click "Report to us" button to let us know and we resolve the issue and return back to you or you can continue without last item via click to continue button.
Home
Content
Tour
eLibrary
Store
Search book title
Filters:
BOOKS
All Books
PACKAGES
All Packages
EDITION
to
PUBLISHER
AABC
(1)
AAMI
(365)
ACI
(651)
AECDAILY
(599)
AISC
(58)
ASA
(290)
ASCE
(1053)
ASHRAE
(728)
ASME
(2285)
ASSE
(117)
ASTM
(98413)
AWC
(58)
AWWA
(643)
BHMA
(137)
BICSI
(35)
BIFMA
(29)
BOMA
(20)
BSI
(99791)
CRSI
(18)
IAHSS
(1)
IAPMO
(396)
ICC
(328)
IEC
(10763)
IEEE
(7368)
IES
(266)
ISEA
(21)
ISO
(24378)
Joint Commission
(206)
Joint Commission Int.
(1)
NEMA
(914)
NETA
(7)
NFPA
(1722)
TCNA
(26)
TMS
(19)
USGBC
(28)
WILEY
(4)
 
AR
(6)
AZ
(7)
CA
(128)
CO
(1)
CT
(3)
FL
(58)
ID
(5)
IL
(5)
IN
(1)
KY
(1)
LA
(2)
MI
(28)
MN
(27)
NC
(36)
NJ
(13)
NY
(71)
OH
(24)
OR
(25)
PA
(7)
RI
(8)
SC
(20)
SD
(1)
TX
(3)
VA
(50)
VT
(6)
WA
(34)
CONTENT TYPE
 Act
 Admin Code
 Announcements
 Bill
 Book
 CADD File
 CAN
 CEU
 Charter
 Checklist
 City Code
 Code
 Commentary
 Comprehensive Plan
 Conference Paper
 County Code
 Course
 DHS Documents
 Document
 Errata
 Executive Regulation
 Federal Guideline
 Firm Content
 Guideline
 Handbook
 Interpretation
 Journal
 Land Use and Development
 Law
 Legislative Rule
 Local Amendment
 Local Code
 Local Document
 Local Regulation
 Local Standards
 Manual
 Model Code
 Model Standard
 Notice
 Ordinance
 Other
 Paperback
 PASS
 Periodicals
 PIN
 Plan
 Policy
 Product
 Product - Data Sheet
 Program
 Provisions
 Requirements
 Revisions
 Rules & Regulations
 Standards
 State Amendment
 State Code
 State Manual
 State Plan
 State Standards
 Statute
 Study Guide
 Supplement
 Sustainability
 Technical Bulletin
 All
  • ASTM
    F1367-98(2011) Standard Specification for Chromium Sputtering Targets for Thin Film Applications
    Edition: 2011
    $144.00
    Unlimited Users per year

Description of ASTM-F1367 2011

ASTM F1367 - 98(2011)

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Active Standard ASTM F1367 | Developed by Subcommittee: F01.17

Book of Standards Volume: 10.04




ASTM F1367

Abstract

This specification covers sputtering targets fabricated from chromium metal for use in thin film applications. The grades of chromium covered in this specification, are based on the total metallic impurity content of the metallic elements, and are classified as 4N, 3N7, 3N5, 3N, and 2N8. Materials shall be tested using analytical methods such as combustion/infrared spectrometry, thermal conductivity, atomic absorption spectrometry, direct current plasma, inductively coupled plasma, and spark source mass spectroscopy or glow discharge mass spectroscopy; and the individual grades shall conform to specified values of chemical composition, density, grain size.

This abstract is a brief summary of the referenced standard. It is informational only and not an official part of the standard; the full text of the standard itself must be referred to for its use and application. ASTM does not give any warranty express or implied or make any representation that the contents of this abstract are accurate, complete or up to date.

1. Scope

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.


2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

E112 Test Methods for Determining Average Grain Size


Keywords

chromium; sputtering; targets; Chromium electronic materials/applications; Chromium sputtering targets; Electronic materials/applications--specifications; Sputtering process/targets--specifications; Targets ;


ICS Code

ICS Number Code 25.220.40 (Metallic coatings)


DOI: 10.1520/F1367-98R11

ASTM International is a member of CrossRef.

ASTM F1367



This book also exists in the following packages...

Year Publisher Title Annual Price
VAR
ASTM
 [+] $1,214.29 Buy
VAR
ASTM
 [+] $2,972.40 Buy

Subscription Information

MADCAD.com ASTM Standards subscriptions are annual and access is unlimited concurrency based (number of people that can access the subscription at any given time) from single office location. For pricing on multiple office location ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.

 

Some features of MADCAD.com ASTM Standards Subscriptions are:

- Online access: With MADCAD.com’ s web based subscription service no downloads or installations are required. Access ASTM Standards from any browser on your computer, tablet or smart phone.

- Immediate Access: As soon as the transaction is completed, your ASTM Standards Subscription will be ready for access.

 

For any further information on MADCAD.com ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.

 

About ASTM

ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide.
GROUPS
X