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BS ISO 21360-5:2023 Vacuum technology. Standard methods for measuring vacuum-pump performance - Non-evaporable getter (NEG) vacuum pumps, 2023
- National foreword
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Symbols and abbreviated terms
- 5 Test methods [Go to Page]
- 5.1 General [Go to Page]
- 5.1.1 Test gases
- 5.1.2 Vacuum chamber
- 5.1.3 Orifice
- 5.1.4 Vacuum pumping system for rough pumping
- 5.1.5 Vacuum gauges
- 5.1.6 Temperature
- 5.1.7 Activation method of NEG
- 5.1.8 Procedure of sample installation and activation
- 5.2 Throughput method for small NEG samples [Go to Page]
- 5.2.1 Experimental setup
- 5.2.2 Sample
- 5.2.3 Determination of getter pumping speed, S, and sorption quantity, Cq
- 5.2.4 Determination of sticking probability, α
- 5.2.5 Measurement procedure
- 5.2.6 Measurement uncertainty
- 5.3 Throughput method with test dome [Go to Page]
- 5.3.1 Experimental setup
- 5.3.2 Sample
- 5.3.3 Determination of getter pumping speed S and sorption quantity, Cq
- 5.3.4 Determination of sticking probability, α
- 5.3.5 Measurement procedure
- 5.3.6 Measurement uncertainty
- 5.4 Transmission method for NEG coatings [Go to Page]
- 5.4.1 Experimental setup
- 5.4.2 Sample
- 5.4.3 Determination of average getter pumping speed per unit area, SA, and sorption quantity Cq
- 5.4.4 Determination of sticking probability,α
- 5.4.5 Measurement procedure
- 5.4.6 Measurement uncertainty
- 5.5 Combination of transmission method and throughput method with test dome
- 6 Reporting [Go to Page]
- 6.1 General
- 6.2 Small size of NEGs with the structure of pill, disk, ring, strip, module and cartridge
- 6.3 NEG pumps
- 6.4 NEG coatings
- Annex A (informative) Calculation method of the molecular conductance of the orifice
- Annex B (informative) Example of diagrams for pumping characteristics of NEG
- Annex C (informative) Typical value of initial sticking probability α0 of NEG at room temperature
- Bibliography [Go to Page]
