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BS EN ISO 14644-13:2017 Cleanrooms and associated controlled environments - Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications >
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BS EN ISO 14644-13:2017 Cleanrooms and associated controlled environments - Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications, 2017
- National foreword
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 General methodology
- 4.1 Overview
- 4.2 Methodology
- 5 Object description
- 6 Cleanliness specifications
- 7 Determination of initial contamination level
- 7.1 General
- 7.2 Determination of initial contamination level with respect to particle concentration
- 7.3 Determination of initial contamination level with respect to chemical concentration
- 8 Other requirements
- 9 Selection of a cleaning methodology
- 9.1 Selection procedure
- 9.2 Cleaning methodologies
- 9.2.1 Cleaning method
- 9.2.2 Categories of cleaning techniques
- 9.3 Cleaning process
- 10 Material compatibility check
- 11 Cleaning validation
- 11.1 General
- 11.2 Cleaning efficiency
- 11.2.1 Evaluation
- 11.2.2 Cleaning efficiency with respect to particle concentration
- 11.2.3 Cleaning efficiency with respect to chemical contamination
- 11.3 Cleaning appropriateness
- 11.3.1 Assessment
- 11.3.2 Cleaning appropriateness with respect to particle concentration
- 11.3.3 Cleaning appropriateness with respect to chemical concentration
- 12 Measurement methods
- 12.1 General
- 12.2 Direct measurement methods
- 12.2.1 General
- 12.2.2 Direct measurement methods with respect to SCP
- 12.2.3 Direct measurement methods with respect to SCC
- 12.3 Indirect measurement methods
- 12.3.1 General
- 12.3.2 Indirect measurement methods with respect to SCP
- 12.3.3 Indirect measurement methods with respect to SCC
- 13 Documentation
- Annex A (informative) Aspects of cleaning
- Annex B (informative) Cleaning methods
- Annex C (informative) Material compatibility with cleaning agents
- Annex D (informative) Cleanliness measurement
- Bibliography [Go to Page]